High aspect ratio Si gratings

for x-ray and neutron imaging

(Pt ALD coating also available)

Period (µm)           Max Depth(µm)

    0.4~0.8                         12

    0.9~1.5                          20

    1.6~2.0                          30

    2.1~2.5                          40

    2.6~4.0                         50

    4.0~6.0                        100

       > 6.0                          150      

* Low aspect ratio Si or SiO2 1-D or 2-D gratings are also available. 

Nanoimprinting molds

(Silicon or silicon dioxide)

Large Area          Small Features

   Minimum Feature Size (nm)

  300 (L/S)                50 (L/S)

  400 (others)           50 (others)